I am in need of a fabrication of microchannel having a depth of 300 um. We
are doing soft lithography using PDMS. For that the silicon wafer we
prepared in Silicon. Su8 is used as the substrate. we have Su8- 2075 with
us.Sir can you share me the protocol for multilayer coating of su8- 2075
for getting a depth of 300 um over silicon wafer so that i can get a
channel of 300 um in PDMS during soft lithography.I searched a lot for this
multy layer coating for high AR channels.But i couldnt get anything.
Expecting your reply
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