Asc,
It really depends on your process, but we were able to use Ebeam evaporation for
lift-off metal. Since the resist would reflow at about 120C, I can safely say
we were below that temperature.
If I remember right, the temperature gauges we used setting up the process said
we were reaching temperatures of about 100C regularly.
Dan
-----Original Message-----
From: mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org [mailto:mems-talk-
bounces+dan.ruiz=honeywell.com@memsnet.org] On Behalf Of Ashay Chitnis
Sent: Saturday, May 03, 2014 2:42 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Substrate temperature in Ebeam
Hi,
I would like to know temperature of substrate in ebeam and sputter for standard
metals and dielectrics.
Asc
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