Hi,
I am a graduate student, who has just started work on MEMS.
My work needs bonding glass anodically to both sides of
single-crystal silicon.We bonded glass to one side of the wafer and then
tried bonding glass to the other side as well.
But it does not work in spite of doubling the applied voltage.
Any suggestions/references about this will be most welcome.
Debjani
Research Scholar (Semiconductor Group)
Department of Physics Ph: (080)309-2316
Indian Institute of Science Fax:(080)334-1683
Bangalore - 560012