I am looking for companies that can deposit a 50-100 micron layer
of amorphous SiC on a 4" substrate that I supply. There will be large
features on the substrate (100 micron), and the substrate will be
subsequently etched entirely to leave a free-standing SiC structure. I am
not interested in SiC wafers or epitaxial SiC. Any information would be
appreciated.
Thank you,
Luke Currano
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*Luke Currano *
*BS/MS Research Assistant *
*MicroElectroMechanical Systems Lab *
*Department of Mechanical Engineering *
*University of Maryland, College Park MD*
*Office: 2110 Engineering Bldg *
*Phone: (301) 405-2981 *
*Fax: (301) 405-3966 *
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