Transene in Massachusetts sells a Ti etch for use with resist. I use it all the
time.

Rick

Draper
Principal  Member of the Technical Staff
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
[email protected]
W 617-258-3420
C 508-930-3461



From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of KarthiKeyan K
Sent: Sunday, May 29, 2016 9:20 AM
To: General MEMS discussion 
Subject: [mems-talk] suitable etchant for titanium thin layer on silicon
substrate

Dear Friends,

Kindly suggest suitable etchant for titanium thin layer on silicon substrate.
(PPR mask pattern over the titanium thin layer)

Looking forward to you reply.

--

Thanks & Best Regards,
KarthiKeyan K

​
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