Hello MEMS.
I want to know about SAL resolution. And Condition.
I use it for E-beam resist .
But my pattern is removed when I doveloped it.
What is problem?
Anyone who know the answer reply to me.
Thank you for reading my mail.
My e- mail address is
iampcm@hanmail.net or iampcm@kuccnx.korea.ac.kr
Sincerely yours.