Hello, MEMS.
I use PMMA as photoresist.
And I want to use anisotropic etching in Silicon(110).
But the PMMA is striped in KOH etchant.
I use KOH, IPA, DI in etchant.
Someone help me.
Is the PMMA is striped in KOH etchant in general or I misuse it?
Please let me know.
Thank you for reading my mail.
Sincerely yours.
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