Hi,
I am contemplating the use of SU-8 photoresist for a selective plating
mask and was wondering how people are measuring the thickness of SU-8 for
thicknesses above 50 microns after deposition and curing. Visible
radiation reflectance (that does not expose the resist) can be difficult
due to the absorption of the signal. After developing, contact or
non-contact profilometers are the obvious choice. I also work at a
metrology company and am trying to analyze the demand for a metrology tool
that could measure this material with an approximate precision of 0.05
microns.
Thanks,
Jaime