You might try PhotoSciences in Torrance, CA. They can use an optical pattern
generator to make fairly low-cost masks if the geometry isn't too complex.
Adam Cohen
-----Original Message-----
From: Kevin M Walsh [mailto:kmwals01@starbase.spd.louisville.edu]
Sent: Monday, December 07, 1998 8:42 AM
To: MEMS@ISI.EDU
Subject: photomasks
Could people give me recommendations for a vendor who will produce patterned
5" chrome photomasks for universities at a decent price to be used in a
1:1 contact aligner. I have several masks to be made.
Thanks,
Kevin Walsh
--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826
Internet address: kmwals01@starbase.spd.louisville.edu