Li Tongshi, ni hao,
sorry, my Chinese is not he best. I have used gold on 30 nm chromium as a
metallization and found the following values
Thickness 100 nm: I/A <= 40 ... 70 kA/mm^2
200 nm: I/A <= 30 ... 50 kA/mm^2
500 nm: I/A <= 14 ... 40 kA/mm^2
1000 nm: I/A <= 6 ... 20 kA/mm^2
Above these levels, increased interdiffusion will set in with considerable
increase in resistance and consecutive failure.
Yours sincerely, Kai Hiltmann
Kai Hiltmann, HSG-IMIT, Wilhelm-Schickard-Str. 10, D-78052
Villingen-Schwenningen, Germany
Ext. ++49-7721-943-132, Fax ++49-7721-943-140
PS: As you may have noted, I have picked your second mail address!
Hi, everyone:
Now we are developing gas sensor and we want to use
Ti and Pt as the heater, but we don't know the maximum
current densities for them. If you know them, you are expected
to tell us.
Any help will be appreciated. You can contact me by the
E-mail:
ligang@ime.pku.edu.cn
hope@chinaren.com
Thanks again.
Sincerely,
Li Gang