Re: Optical equipment for measuring thick polymers
Yohannes
1999-01-29
You might want to look at the WYKO surface profiler. In the past, we have
used it to obtain a 3-D profile of patterned x-ray resist. The following
description is from the homepage of the Center for Advanced Microstructures
and Devices CAMD)
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http://www.camd.lsu.edu/cleanroom/anand1/interfer.html
A standard metrology tool for 3D imaging of microstructures and step
analysis, the Wyko is commonly used to measure surface roughness of thin
films and electroplated materials. Optical measurement of vertical steps
can also be made from patterned metallic films or PMMA.
Features:
VSI modes of operation with applications between 10 nm and 500um
5, 10, 20 power magnification
Capabilities:
Automatic step measurements
Automatic 3D profiles
10 nm resolution
Measurements up to hundreds of microns
Applications:
Thin film surface roughness
Step height measurements
3D viewing of steps or surfaces
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Regards
Yohannes M. Desta
Graduate Research Assistant
MicroSystems Engineering Team
LSU Dept. of Mech. Engr.