Dear All,
Can anyone help by telling me does a MUMPs (surface micromachined)
resonator work without having a grounding Poly0 layer beneath its
suspended mass (Poly1 layer) and if possible, why ?
By the way, does anyone know the breakdown voltage for the nitride
for MUMPs devices ?
Thanks !
CHUA Bee Lee
Undergraduate
Dept of Mechanical & Production Engineering
National University of Singapore