Dear colleagues,
I am interested to apply a metal layer (CrAu for instance) in an array
of
V-grooves anisotropically etched in (100) Si. My question is the following:
Are there any troubles regarding the metal deposition on the bottom of
the
V-grooves? If yes, how can I deal with those troubles?
(the V-grooves are 70 microns wide and 30 microns deep)
Best regards
Vlad Badilita
Vlad Badilita - dipl. phys.
Multidisciplinary Research Dpt.
Micromachined Structures, Microwave Devices and Circuits Lab.
National Institute for Research and Development in Microtechnologies
IMT - Bucharest
P.O. Box 38-150, Bucharest 72225, Romania
Fax: +40-1-230.75.19, +40-1-411.46.61
Web page: http://www.imt.ro