I'm an Electronical Engineering student and I'm researching my thesis on MEMS at
the Institute for High Frequency Technique at Technique University of Munich
Germany.
The target of my thesis is a MEMS Capacitive Switch in Coplanar Waves Guided
Technology (CPW) that works in K-band (30-40 GHz) and at low DC actuation
voltage.
I have a good simulation tool for the Electromagnetic behaviuor, but not for the
Mechanical one.
Moreover, what I'm looking for is an environment which is able to integrate the
two aspects, resulting in the actuation voltage, the membrane dinamical
behaviuor and the scattering paramiters of the device.
Does such a tool exist? If yes, does it include also an optimization tool?
Thank You for Your time and I hope to hear from You soon
Sincerely Fabio Coccetti