questions about anodic bonding of Si and Pyrex glass
huxx0043
1999-01-19
Hello!
I am a new learner in anodic bonding of Si and glass, I read many
papers about anodic bonding of Si wafer and pryex glass #7740. Some
authers use p-type Si, others use n-type Si.Some mentioned the
resistivity of Si wafer, others didn't. So I am confused. Is there any
relationship between type and resistivity of Si and anodic bonding of Si
and glass? If there is, what is the relationship?
Since I have to use that in my project soon, does anybody can give me an
answer or a hint ASAP?
To my application, I only want to bond Si and Pyrex 7740 and then thin
the glass to the desired thickness. My application has no relation with
electronics or electricity. What is suitable doping type and resistivity
of Si wafers I should use.
Thank you so much for any hint or answer about the above questions.
Haitian Hu