Xu Jun,
This is an active research topic at CalTech. Check out the research of
Michael Roukes. He's actively working on this question.
Cary
On Mon, 22 Feb 1999, Xu Jun wrote:
>
> Hello!
>
> I want to know the following answers:
> 1. how to calculate Q factor in a capacitive microaccelerometer?
> 2. the higher Q factor,the better performance of device?
>
> regards
> xu jun
>
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