Hi there,
Can any of you fill me in on anodic bonding techniques which can be
succesfully used to bond two py7740 wafers together? I need a method
which minimizes the gap between the pyrex parts (preferrably < 1 mu>.
Thanks!
Regards
--
Yit-shun Leung Ki
Graduate Student in Microfluidics
_______________________________________________________________
Institute of Microsystems (IMS)
Dept. of Microengineering,
Batîment BM,
Swiss Federal Inst. of Tech. (EPFL), TEL: +41 21 693 7818
CH-1015 Lausanne FAX: +41 21 693 5950
Switzerland URL: dmtwww.epfl.ch/ims