I'm compiling the responses to my request for LPCVD deposition here under:
>From Dave Scherrer:
You can get a custom LPCVD oxide run at ACT MicroDevices.
Contact Greg TenEyck @ 540-639-1986 x 13.
>From Jeff Melzak
We can probably perform your LTO deposition here at CWRU
Please call me to discuss the details (process, pricing).
Jeff Melzak
Manager, CWRU Microfabrication Laboratory (MFL)
(216)368-3628
>From Karen Markus, MCNC (Markus@mcnc.org):
we do not have the ability to process 2" wafers. However, if you would like to
run 4" wafers, we would be glad to provide this service through our TechNet
program, which is well documented on our website.
>From bchen@atmi.com
Try Chris Ball @ MCNC. He's usually very good in replying.
ball@mcnc.org
919-248-1479
From: akt1@cornell.edu
Try Cornell CNF www.cnf.cornell.edu, I 've seen people coming from out of
state universities doing their fab here
Prof. R. Levy at NJIT can also do it. He can be reached at (973) 596-3561
Thanks to all of you. i hope this information would be of use to some of you.
Shekhar