Dear Shekhar,
You can get a custom LPCVD oxide run at ACT MicroDevices.
Contact Greg TenEyck @ 540-639-1986 x 13.
Regards,
David Sherrer
Shekhar Bhansali wrote:
> We would like to get low stress LPCVD oxide deposited on 4 2-inch
> micromachined wafers. I'd be happy to pay for the service.
>
> I and my student have already tried to reach MCNC with no luck (We've left
> plenty of voicemails but no one has returned the calls.....yet).
>
> Thanks
> Shekhar Bhansali, Ph.D.
> Center for Microelectronic Sensors and MEMS
> Department of Electrical & Computer Engineering and Computer Science
> University of Cincinnati
> Cincinnati OH 45221-0030
> Phone: (513) 556 0903 Fax: (513) 556 7326
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