Hello All,
I'm looking for MEMS' specific reliability and long-term stability
standards, models, test methods and experimental results. Bulk
micromachined sensors with anodic or fusion bonded wafers (acceleration
sensors, pressure sensors) are from special interest. Any informations and
suggestions will be deeply appreciated.
Sincerely,
Roumiana
Dr. Roumiana Paneva
X-FAB GmbH
Haarbergstasse 61
D-99097 Erfurt
Deutschland
Tel: (+49) 361 42 053 21
FAX: (+49) 361 42 053 11