Dear MEMS Researchers,
Would you know of a wax material that I can use to protect one side of a wafer
while etching the other side in TMAH (or EDP)?
Thanks,
Shivalik
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Shivalik Bakshi,
School of Engineering Science,
Simon Fraser University,
Burnaby, BC V5A 1S6
Canada
Email: sbakshi@cs.sfu.ca
Tel: (604) 298-6847