Nonlinearity of conventional interdigitated electrostatic
Jer-Liang Yeh
1999-04-12
combdrives
Dear community members,
Could anyone tell me which papers describe the nonlinear force
output of conventional interdigitated electrostatic combdrives when the
overlapping length of combs is small (eg. less than the gap)? Any
theoretical or experimental work is appreciated.
later,
Andrew Yeh
Cornell University