deflecetion measurement of bimetallic cantilever beams
Junhua Wu
1999-04-16
Hi:
We are using a laser optical system to measure the deflection of the
bimetallic cantilever beams. We are not using the interferometer method.
Our output signal is a voltage from the PSD(Position Sensitive Dectector),
and we would like to know how much does the cantilever beam deflect.
Does anyone have such experience to calibrate this kind of measurement?
I would appreciate any suggestions.
OR some advice on how to measure the deflection of the bimetallic
cantilever beam(say, a 100um X 50um cantilever).
Thanks,
Junhua Wu