Hi -
There is one called ACES (Anisotropic Crystalline Etch Simulator....I think).
You can get beta copies off the web just do a search for Aces...
Mike Rosa.
At 10:44 AM 4/14/99 PDT, you wrote:
>
>Does anybody has any information on a
>software that simulates KOH/EDP etch of
>silicon..(basically to get information
>on issues like corner compensation,
>under-cut).
>
>Thanks,
>
>Kavita Chandra
>
>
>
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