Re: Hi Guys, could you tell me what the density of LPCVD
Carlos Mastrangelo
1999-04-21
polysilicon
It is 2.3 gr/cm^3. Same as for bulk.
On Mon, 19 Apr 1999, Dung-An Wang wrote:
> Dear MEMS people
> Could you tell me what the density of LPCVD polysilicon is ?
> I much appreciate that.
> Have a good day.
>
>
>
> Sincerely,
> Dung-An
>
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