Straub, Marc (M.A.) wrote:
> Does anyone have or know of any experience using silver thin films as masks
> for etching silicon in any of the common anisotropic etch processes,
> including KOH, TMAH, EDP or the Bosch/STS Deep RIE process? [I need Ag on
> my finished device for an unrelated reason, but it would be very helpful if
> I could also use it as an etch mask.]
We use gold as an etch mask for KOH. Works like a charm. I don't have
them at my fingertips, but you could ask one of our process engineers,
Dean Hopkins (hopkinsdjr@aol.com), for references.
Al
--
Albert K. Henning, Ph.D.
Director of Technology 650/617-0854 (Office)
Redwood Microsystems 650/326-9217 (FAX)
959 Hamilton Avenue henning@redwoodmicro.com
Menlo Park, CA 94025 http://www.redwoodmicro.com