There are plenty of commerical chrome etches available. They are used for wet
etching the chrome in photolithography mask production !
I am pretty sure these are all orthphosphoric based.
Any major semiconductor chemical vendor should be able to help you with a
sample.
Cheers
Conor.
-----Original Message-----
From: PC :dmenche@lightwavemicro.com [SMTP:PC :dmenche@lightwavemicro.com]
Sent: 13 May 1999 00:01
To: MEMS@ISI.EDU
Subject: Chrome etch
We are using chrome as a hard mask to dry etch SiO2.
What is a good chrome echant that will not attack the photo resist, nor
SiO2, and what kind of etch rate is expected. tried potassium
permaginate/potassium hudroxide solution, and find it is very slow at
chrome etch, and fast at dissolving the resist.
thanks dave menche