Dear MEMS researchers: IntelliSense is seeking anisotropic etching information
for the following etchants:
KOH, TMAH, EDP
The information that we are looking for are the 100, 110, and 111 etch rates as
a function of temperature and concentration (mix). For convenience, the
following table is provided. Please either use the following table, or send us
the complete information in your own format.
Fariborz Maseeh
For IntelliSense Corporation
16 Upton Drive
Wilmington, MA 01887
(508) 988 - 8000
(508) 988 - 8001 fax
Etchant (KOH, EDP, TMAH)
Additive (IPA, etc.)
Temp. Concentration Etch rate 100 Etch rate
110 Etch rate 111
(deg. C) (% by wt. in DIH2O) (micro/min) (micro/min)
(micro/min)