Question to discussion group:
I am looking for another method to remove Chromium. I used Chromium and
HPR1183(photoresist) as mask, but the echant to remove Chromium removed the
photoresist. The method to remove Chromium I used is NaOH and K3[Fe(CN)6](It
is NaOH to damage the HPR1183).
I tried diluted HCL and HNO3, which was looked up in an article, but failed.
I do not know the volumn rate and consentration of them.
Could you help me?
thank everybody in advance.
Sun kai
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Kai Sun( $BB9!!3. (J)
Dept. of EcoSystem Engineering,
Graduate School of Engineering,
The University of Tokushima,
2-1 Minamijyosanjima,
Tokushima 770-8506, Japan
Tel: 4378 (O)
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