Hello All,
I am hoping to do some bulk micromaching in silicon where the structures are up
to 450 micrometers deep. Given that the standard wafer thickness is 475
micrometers, this is going to be a problem, especially since some of the
structures will be trenches that will run the entire length of the wafer.
Is anyone aware of a reasonably priced supply of double-thickness wafers?
Alternatively, has anyone had success with bonding two wafers together?
I would appreciate any input in this matter.
Robert Johnstone