Dear Sirs,
Now I have encountered a difficulty in writing pits in the range of
0.2~0.8 micron in length and 0.25 micron in width along circles (like
the pits written on a DVD disc). Do you know a method or a commercial
S/W which allows the E-beam lithography to 'write' a tremendous number
of data along circular lines. The S/W we used can only generate data
along straight lines, we also lack of the means to copy the basic 10 pit
patterns to all over a circle.
In simple words, we want to 'write' pits with random length of 0.2~0.8
micron and fixed width along a circle. Do you have some idea and
suggestions?
Thanks and regards
Thank you
Dr JB Zhang
Data Storage Institute
National University of Singapore