Dear MEMS,
Hello, I am Akiko Kubota from Michigan State University.
I have a question about anisotropic etch.
We have 100 orientation silicon wafer and would like to etch. I know
the etching angle will be 54.7 degree. However I am not sure if it'll
be the same angle even we etch the diagonal rectangular opening over the
silicon wafer. Does the angle differ from etching straight opening? I
suppose the angle is same. But please let me know.
It'll be appriciated very much. Thank you.
Sincerely yours,
Akiko Kubota