Dear Peter,
The problems are probably due to internal reflections in the glass. You
can try an Anti reflecting coating - either evap / sputter some metal on
the glass or you can purchase spin on ARC from Brewer Science.
Shay Kaplan
Peter Ting wrote:
> I had some troubles in doing photolithography on glass
> slides, especially when the pattern size is around two
> microns. Most patterns were deformed. However, when
> silicon wafers instead of glass slides were used as
> substrates, everyghing looks fine. Who can tell me why
> and how to solve this kind of problem.
> Thanks a lot!
> Mark
> Dept. of Chemistry
> Univ. of Washington
>
> __________________________________________________
> Do You Yahoo!?
> Send instant messages & get email alerts with Yahoo! Messenger.
> http://im.yahoo.com/
>