I am in the market for a downstream plasma system to perform a MEMs
release
on a 50 uM by 50 uM square structure. It will be resting on a 2.5 uM bed
of
polyimide. Any recommendations as to what equipment to consider. I
prefer
to acquire a unit on the secondary market. The footprint may also be a
consideration.
Anyone have any experience with a YES CV100PZ system?
TIA
Pat Franklin
Indigo Systems