Dear all,
I am looking for advice and comments on how to carry
out multiple layer anodic bonding between silicon and
borosilicate glass wafers.
Secondly, what are the methods I can use to drill
holes (in the order of 1mm dia) in borosilicate glass.
Thank you very much.
CHOONG Weng On
National University of Singapore
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Best Regards,
CHOONG Weng On MEMS-LAB (EA 02-09) National
University of Singapore DID: +65 874-4567 Fax:
+65 874-4509
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