Behavior of piezoresistive coefficient and E-modulus of silicon
Roy Knechtel
2000-01-07
Dear MEMS-colleagues,
I'm locking for any informations about the temperature behavior of the
e-modulas and the piezo coefficient in a temperature range below -25°C.
We've an inceasing sensitivity at a micromechanical pressure sensor and
now we are searching for an explaination.
Roy Knechtel
X-Fab Gesellschaft zur Fertigung von Wafern
Haarbergstraße 61
D-99097 ERFURT