Dear colleagues,
My problem is I have a Materials Research Corp. sputtering system with a broken
glass chamber cylinder. The system may be more than 20 years old and I do not
know if the glass was part of the initial system. The cylinder is 6.5 inch long
and 441 mm (inside diameter) and aprox. 8mm thick. It sits on a MRC, type
SM-8500, aluminium feedthroughs collar. Can anyone inform me if such a glass
cylinder is available 'off the shelf' anywhere. If I use a stainless steel
cylinder will this alter my sputtering parameters?
Thank you, Anthony holland
Anthony Holland (Research Associate)
Dept. of Communication & Electronic Engineering
RMIT University
GPO Box 2476V
Melbourne
VIC 3000
AUSTRALIA
Tel. 61 3 9925 3832
Fax. 61 3 9662 1060