Hi colleagues,
Is there a company that can provide an array of
thermal oxide windows, ~0.5 to 1 um thick, dimensions
something like 20 um x 100 um, spaced as needed to make
the Si wafer (could be 250 um thick, for example)
mechanically stable?
One imagines this might be done by
a. growing thermal oxide top side to 0.5 to 1 micron
thickness
b. patterning back side
c. Bosch deep etching from back side to the oxide
etch stop
Thanks in advance.
Junghoon