I have an immediate application for a MEMS based Mass Spectrograph. The
MEMS based approach was reported in a publication about 5 years ago,
"Microelectromechanical Systems Opportunities, A Department of Defense
Dual-Use Technology Industrial Assessment". The report discusses a MEMS
based Mass Spectrograph on a chip, which integrates a vacuum pump,
ionizer, an ion detector array, and the control electronics on a
monolithic chip. The article referenced work performed at DARPA by a
Kaigham Gabriel, July 1994. I would like any information on what has
been done since then on the development of such technology/products. The
article reported a conventional mass spectrograph at $17k, 70 kg, 1200
watts and 30,000 cubic centimeters vs the MEMS based solution at $20,
200 grams, 0.5 watts and 3 cubic centimeters.