I received this question from a co-worker. Please respond directly to me.
thanks in advance,
Marisa Ahmad
--------------------
Small question. We have a Leybold mechanical pump hooked to a Reactive Ion
Etcher. It is running 24 hrs/ day, and pumps actively on the chamber about
35 times per day. How often should a pump under these conditions be rebuilt?
The reason I am asking is the pump seems to be blowing seals and requires
rebuilding about once a year, the manufacturer says this is normal...is it?
If not, what should we do to improve the time between rebuilds?