piezoresistive coefficients of <111> silicon wafer
Ebin Liao
2000-11-30
Hi, MEMS colleagues:
I'm studying a MEMS-based piezoresistive pressure
sensor. Who can tell me the piezoresistive
coefficients (including longitudinal and transverse)
of silicon resistors with various longitudinal
direction, which were implanted into the surface of a
<111> wafer? Or where can I find these data? Thanks!
Liao Ebin
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