Silicon is a strong material they say....
We have put our bulk micromachined silicon chips in a plastic package. Some of
the chips breaks or we can se fine cracks, usually close to the v-grooves.
There is a bonded glass lid on top of the v-grooves that should strengthen the
device. The chips also had been edge polished after dicing with 3 microns and
0.3 micron papers. Do anyone know if the polishing itself can lower the
mechanical strength of the chips? Or is the dicing bad enough?
Hakan Elderstig