Dear Colleagues:
I encounted time-dependent Cr-Au adhesion failure. We
RF plasma deposited 20nm Cr and 300nm Au onto
fluorinated polymers (ultra low Tg -100C). Immediately
after patterning and wet etching, the Cr-Au electrodes
(40 microns wide) stick fine on the fluoropolymer. But
after several days in air and room temperature, Cr
will be easily peeled off from Au. Under SEM we found
the deposited Au is truly porous with grain size
around 100nm.
I am appreciated any comments about this issue and you
have a good night.
Peng
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