Dear You,
I am desperately looking for Diffusion Data of Hydrogen in various
materials. The Materials should act as a diffusion barrier against hydrogen
on silicon.
I have already researched the Landolt-Bornstein series, but still looking
for alternative data on various materials. Especially if somebody can
provide data on Silicon-Oxy-Nitrides (including process data) I would be
very gratefull.
Thank You,
Tom