How to remove gold layer but not destory copper structures?
Ren Yang
2001-06-11
Hello,
I need etch the 0.05 micron thick gold layer after I
do copper electroplating. But I find the gold etch
will etch the copper structures. Did someone know how
to remove the gold layer but not distory the copper
structures ? ( Except the ion milling )
Thanks for your help
Ren Yang
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