Hi,
We offer DRIE services on 6 inch wafers. We use STS DRIE system. We have
already done variety of jobs to various types of customers. For further
info, please refer to following links:
1. http://www.ime.org.sg/fid/fid_index.htm
2. http://www.ime.org.sg/fid/fid_index.htm
Best Regards
Ranganathan
Foundry for Innovative Devices
Institute of Microelectronics
e-mail: nathan@ime.org.sg
Phone: 065-8700121
> ----------
> From: Oleg Siniaguine[SMTP:osiniagn@trusi.com]
> Reply To: Oleg Siniaguine;mems-cc@ISI.EDU
> Sent: Thursday, 21 December 2000 7:43
> To: MEMS@ISI.EDU
> Subject: DRIE service
>
> We are looking for a deep RIE service for 6 and/or 8" wafers. Any info
> will be appreciated.
>
> Oleg
>
>
>