Hello,
Does anybody know who has experience with deposition of oxide/nitride/oxide
for stress compensation? Thanx
- Steve
Steven J. Gross
Graduate Researcher
The Pennsylvania State University
Department of Electrical Engineering
121 Electrical Engineering East
University Park PA
16802
Fax (814) 865 2798
Office (814) 865 1267
Home (814) 235 9685
http://www.personal.psu.edu/users/s/j/sjg12/