Dear colleagues,
I will like to find model(s) discussing step coverage of trenches and
pillars of various dimensions with
a) common photoresist;
b) CVD deposited films;
c) HDP deposited films;
d) ALCVD deposited films.
I hope I can have model(s) that describe situations for isolated
trenches/pillars and dense trenches/pillars.
Please kindly help. It's fairly urgent.
Rgds,
Randall
DL, Singapore