Hi,
I've done some literature research for CTE (Coefficent of thermal
expansion) data for some common thin film resistor materials, but
was only able to find some scattered bulk values.
Can anyone help me out with the CTE of as-deposited (PVD) thin film
or point me to a potential source ? Of course, this will depend on
deposition conditions, but anything is better than nothing ;-)
I'm looking for a 0 - 300 C temperature range.
NiCr
TaN
Ta
Al0.5%Cu
TaAl (ca. 85 at% Al)
TiW (ca. 10 wt% Ti)
thanks
klaus