young's modulus,compliance coeff, poission ratio ofSi in <110>direction
anant narain
2001-09-24
hi!
i am student doing M.Tech (microelectronics and vlsi
design) from I.I.T.Kharagpur,India.
i am presently working in MEMS and developing a
piezoresistive accelerometer.
i wish to know the elastic constt. of Si in <110>
direction specifically the Young's modulus,poisson's
ratio, and compliance coeff. along <110>
thanks,
great regards,
anant narain
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